The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping. SPECIFICATIONS Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation. Includes 2-3, 4-6, or 8″ wafer vacuum chuck. LIS 3, low inertia sensor with 1 to 15mg of force. 3.1Mpixel color camera with selectable magnification. Optically flat scan block with 55mm scan length. Environmental enclosure to prevent against acoustic interferences. Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size. Stitching for up to 200 mm scans. 3D map collection and extensive data analysis. Automated collection capabilities with unlimited number of locations.
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