The Bruker Dektak-XT is a semi-automated stylus profiler that can be used to measure step height with better than 5 Å repeatability, surface roughness, as well as 3D surface mapping. SPECIFICATIONS Motorized X/Y stage with 6 inches of travel, motorized 360 degree rotation. Includes 2-3, 4-6, or 8″ wafer vacuum chuck. LIS 3, low inertia sensor with 1 to 15mg of force. 3.1Mpixel color camera with selectable magnification. Optically flat scan block with 55mm scan length. Environmental enclosure to prevent against acoustic interferences. Better than 5 Å step height repeatability, 1 σ using a 0.1 μm step size. Stitching for up to 200 mm scans. 3D map collection and extensive data analysis. Automated collection capabilities with unlimited number of locations.
Contact the CUNY Advanced Science Research Center NanoFabrication Facility at firstname.lastname@example.org with inquiries. Potential new users can visit http://nanofab.asrc.cuny.edu/become-a-member/ for instructions on becoming a qualified user.
You don't currently have scheduling rights to this resource
To gain access you must be a member of CUNY ASRC NanoFabrication Facility, a member of a group partnered with this group, or affiliated with the resource owner.