The Brewer Science Cee stand-alone spin coater / hotplate is dedicated for the spinning of electron beam resists. The tool is capable of spin coating substrates up to 7” square or 200-mm round and features high torque for maximum ramping capability. You can also spin coat smaller size substrates (<1-cm through 200-mm) using a wide array of spin-coating chuck sizes. The precision hotplate has a temperature range from ambient to 300˚C with resolution of +/- 0.1˚C and uniformity of 0.3% across the working surface.
Contact the CUNY Advanced Science Research Center NanoFabrication Facility at firstname.lastname@example.org with inquiries. Potential new users can visit http://nanofab.asrc.cuny.edu/become-a-member/ for instructions on becoming a qualified user.
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