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Blue m ovens

CUNY ASRC NanoFabrication Facility Equipment

Convection Ovens (Blue M)

http://nanofab.asrc.cuny.edu/tool/blue-m-ovens/

Two ultra-stable Blue M Ovens for soft and hard baking of photoresists as well as post coat baking of spin on dopants and spin on glass are available in the lithography bay.


Access Instructions

Contact the CUNY Advanced Science Research Center NanoFabrication Facility at nanofab@asrc.cuny.edu with inquiries. Potential new users can visit http://nanofab.asrc.cuny.edu/become-a-member/ for instructions on becoming a qualified user.


You don't currently have scheduling rights to this resource
To gain access you must be a member of CUNY ASRC NanoFabrication Facility, a member of a group partnered with this group, or affiliated with the resource owner.


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